TFA spare parts

Here you will find masks, sample holder and measuring chips for your TFA.

Cloverleaf masks 100 pcs.

Cloverleaf masks for sample preparation100 pieces

Product number: 10920002

€199.00*

Foil masks 100 pcs.

Foil masks for sample preparation100 pieces

Product number: 10920001

€119.00*

Measuring chips with CDV siliciun nitride passivation

24 pieces300 nm membrane thickness Exceptionally robust chip for maximum durability

Product number: TFA/CHIP_CVD_300

€590.00*

Metallic shadow masks 10 pcs.

Metallic Shadow mask for sample preparation10 pieces

Product number: 10920000

€99.00*

Sample holder lid with spring loaded contacts

Product number: TFA/SH_LID

€1,650.00*

Special measuring chips with ALD alumina passivation

24 pieces100 nm membrane thicknessSpecial version for materials with low thermal conductivity and thin films

Product number: TFA/CHIP_ALD

€590.00*

Spin coating holder

For vacuum chuck

Product number: 16-001-009

€150.00*

STANDARD measuring chips with Si3N4 Membran and siliciun nitride passivation

24 pieces100 nm membrane thicknessStandard version

Product number: TFA/CHIP_CVD

€530.00*