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HCS 1


Characterization of semiconductors and devices

Sample mounting boards

Sample mounting board 25 x 25 mm
Mounting Board for samples from 17.5 x 17.5 mm to 25 x 25 mm
Maximum sample height 5 mm
Product number: HCS/H1B/25

€425.00*
Sample mounting board 50 x 50 mm
Mounting Board for samples from 42.5 x 42.5 mm to 50 x 50 mm
Maximum sample height 5 mm
Product number: HCS/H1B/50

€795.00*
Sample mounting board 12.5 x 12.5 mm
Mounting Board for samples from 5 x5 mm to 12.5 x 12.5 mm
Maximum sample height 3 mm
Product number: HCS/H1B/12

€425.00*
High temperature sample mounting board
For measurements from RT to 600°C
<font color="#e6662f">Additional high temperature option for HCS needed</font>
Sample holder made of ceramic
Mounting Board for samples from 5 x 5 mm to 10 x 10 mm
Maximum sample height 3 mm
Product number: HCS/HTB

€1,850.00*
HCS Seebeck sample mounting board
Sample mounting board for Seebeck Coefficient
For measurements up to 200°C (incl. TC probes)
Mounting board for samples from 20 x 20 mm to 25 x 25 mm
Maximum sample height 5 mm
Product number: HCS/SEEB/H1B

€895.00*

Reference sample & other accessories

ITO (Indium Tin Oxide) reference sample
Incl. certificate
Product number: 20C07095

€195.00*
Indium tin solder
For better contact between sample and take-up

Composition: 95% indium, 5% tin
Size: 50 x 50 x 3 mm
Product number: 40000048

€225.00*

The HCS System permits the characterization of semiconductor devices regarding their electric transport properties, in particular Hall-mobility, Charge Carrier Concentration, Resistivity and Seebeck Coefficient. The integrated desktop setups offer a complimentary product line-up from a basic, manual operated, Hall Characterization stage to an automized high temperature stage up to the innovative Halbach configuration for the characterization of most challenging samples.
The systems can be equipped with different sample holder for various geometries and temperature requirements. An optional low temperature (LN2) attachments is available as well as a high temperature version up to 800°C, to ensure that all fields of application can be covered. Depending on the system configuration, either a permanent magnet, a water cooled electromagnet or a Halbach magnet provide magnetic field strength of up to 1 Tesla. The comprehensive Windows based software offers an easy to use graphical user interface to control the system parameters, define measurement procedures and temperature profiles as well as allows for an easy data evaluation, presentation and storage.

Measurement features:

  • Charge Carrier Concentration (Sheet [1/cm²]/Bulk [1/cm³])
  • Hall-Constant [cm³/C]
  • Hall-Mobility [cm²/Vs]
  • Sheet resistance [Ω]
  • Resistivity [Ωcm]
  • Conductivity [S/cm]
  • Alpha (horizontal/vertical ration of resistance)
  • Megneto resistance
  • Seebeck Coefficient [μV/K]

System features:

  • Gas tight measurement chamber which allows measurements under defined atmospheres or vacuum conditions
  • 120 mm diameter magnets for highest field homogeneity and maximum accuracy as well as biggest measurable sample sizes
  • Modular and upgradeable system design
  • High temperature version up to 600°C / 873 K
  • Illumination option with LED Light source (multiple wavelength)
  • Lock-in amplifier upgrade for lowest noise measurements
  • Connector for use of external electronics
  • Integrated software package for easy handling
  • Seebeck Coefficient option to apply on board temperature gradients up to 20K



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Permanent Magnet Option (HCS 1)

The HCS 1 stage is equipped with two magnetic circuits (Neodymium), assembled on a moveable sledge, which optionally can be automized. The system can be equipped with a low temperature as well as high temperature extension.

Specifications


Model

HCS 1

Temperature range:From LN2 up to 600°C in different configurations
Magnet:
Permanent magnets up to 0.70 T DC field
Pole diameter 120 mm
Two magnet setup for bipolar measurement.
Current source:
DC 1nA up to 125mA (8 decades / Compliance +/- 12V)
AC 16 μA up to 20 mA and output impedance: >100 GigaOhm from 1 mHz to 100 kHz
Voltage measurement:
DC low noise / low drift 1μV up to 2500mV, 4 decades amplification, Digital resolution: 300pV
AC 20 nV up to 1V, Features: GΩ range input impedance, variable integration times and amplification
Sensors/ Sample geometry:
– from 5 x 5 mm to 12.5 x 12.5 mm, Maximum sample height 3 mm
– from 17.5 x 17.5 mm up to 25 x25 mm, Maximum sample height 5 mm
– from 42.5 x 42.5 mm up to 50 x 50 mm, Maximum sample height 5 mm
– High Temperature board, 10x10mm, max. sample height 2mm
Resistivity Range:10-4 up to 107(Ωcm)
Carrier concentration:107 up to 1021cm−3
Mobility range:10-2 up to 107(cm2/Volt sec)
Atmospheres:Vaccum, inert, oxidizing, reducing
Temperature precision:0.05°C


Model

HCS 1

Sample Geometry:
length 6 mm to 15 mm,
width 1 mm to 10 mm,
height thin film to 2 mm
Seebeck Coefficient:from 1 μV/K up to 2500 μV/K
Measurement:Slope technique with 10 Readings/Sec
Gradient heater:from 0.1 K up to 20 K
Thermocouples:Type K

Accessories

Extend your capabilities

  • Different sample holders are available to take measurements from LN2 up to 800°C.
  • The sample holder handle closes the measurement chamber vacuum tight.
  • The measurement chamber is provided with a gas in and outlet, so measurements can be taken under controlled and changeable atmospheres.

Software


All LINSEIS devices are PC controlled, where the individual software modules exclusively run under Microsoft® Windows® operating systems. The integrated software allows for an easy handling, temperature control, data acquisition and data evaluation.

General features:

  • NIST routine to find optimum measurement settings and get highest accurate results
  • Extended connection test
  • Possible integration of external electronics
  • Optional Database storrage
  • Optional Lock-in amplifier integration
  • Automatic sensor recognition (EEPROM)
  • Automatic evaluation
  • Fully automatic cooling regulation
  • HCS 10 online access to fit data

Applications



Antimony Thin Film (150 nm Sb)

Antimony (Sb) is a semimetal, which is widely used in the field of thermoelectrics (in form of alloys, e.g. Bi1−xSbx) and as an emerging application is the field of microelectronics. Nevertheless, the largest applications for metallic antimony are lead antimony plates in lead–acid batteries. The figure shows a full characterization of a thin film on SiO2/Si substrate, prepared by sputter deposition, with the Linseis HCS 1 (RT to 200°C option).